Duane S. Boning
homepage:http://www-mtl.mit.edu/~boning/
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Description

Duane S. Boning received the S.B. degrees in electrical engineering and in computer science in 1984, and the S.M. and Ph.D. degrees in electrical engineering in 1986 and 1991, respectively, all from the Massachusetts Institute of Technology. He was an NSF Fellow from 1984 to 1989, and an Intel Graduate Fellow in 1990. From 1991 to 1993 he was a Member Technical Staff at the Texas Instruments Semiconductor Process and Design Center in Dallas, Texas, where he worked on semiconductor process representation, process/device simulation tool integration, and statistical modeling and optimization.

Dr. Boning is a Fellow of the IEEE, is Editor in Chief for the IEEE Transactions on Semiconductor Manufacturing, and has served as chairman of the CFI/Technology CAD Framework Semiconductor Process Representation Working Group. He is a member of the IEEE, Electrochemical Society, Eta Kappa Nu, Tau Beta Pi, Materials Research Society, Sigma Xi, and the Association of Computing Machinery.


Lectures:

lecture
flag Lecture 21: Case study 3: spatial modeling
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2256 views
  lecture
flag Lecture 19: Case study 1: tungsten CVD DOE/RSM
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2306 views
lecture
flag Lecture 17: Nested variance components
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2217 views
  lecture
flag Lecture 16: Process robustness
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2244 views
lecture
flag Lecture 15: Response surface modeling and process optimization
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
3729 views
  lecture
flag Lecture 14: Aliasing and higher order models
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
1964 views
lecture
flag Lecture 13: Modeling testing and fractional factorial models
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2298 views
  lecture
flag Lecture 12 : Full factorial models
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2350 views
lecture
flag Lecture 10: Yield modeling
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2367 views
  lecture
flag Lecture 9: Advanced and multivariate SPC
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2639 views
lecture
flag Lecture 8: Process capability and alternative SPC methods
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2536 views
  lecture
flag Lecture 6: Sampling distributions and statistical hypotheses
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2993 views
lecture
flag Lecture 5: Probability models, parameter estimation, and sampling
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
3802 views
  lecture
flag Lecture 4: Probability models of manufacturing processes
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
2618 views
lecture
flag Lecture 2: Semiconductor process variation
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
3343 views
  lecture
flag Lecture 1: Introduction — processes and variation framework
as author at  MIT 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303),
3006 views