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Integrirani tankoplastni Ti/Pt mikrogrelci in temperaturni senzorji na dvostranski Si MEMS platformi
Published on Jun 18, 20132456 Views
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Integrirani tankoplastni Ti/Pt mikrogrelci in temperaturni senzorji na dvostranskiSi MEMS platformi00:00
Uvod00:21
Eksperimentalni del01:56
Realizacija platforme03:08
DRIE04:12
Mikrostrukturne lastnosti Ti/Pt plasti05:24
Rezultati meritev temperaturnih senzorjev06:13
Analiza delovanja Ti/Pt 06:54
Analiza sistema08:06
Zahvala09:01