About
This course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control, are covered. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.
Course Homepage: 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303)
Course features at MIT OpenCourseWare page: *Syllabus *Calendar *Readings *Assignments
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Uploaded videos:
Lecture 1: Introduction — processes and variation framework
Dec 14, 2010
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3015 Views
Lecture 2: Semiconductor process variation
Dec 14, 2010
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Lecture 3: Mechanical process variation — physical causes and interpreting data
Dec 14, 2010
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Lecture 4: Probability models of manufacturing processes
Dec 14, 2010
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Lecture 5: Probability models, parameter estimation, and sampling
Dec 14, 2010
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3817 Views
Lecture 6: Sampling distributions and statistical hypotheses
Dec 14, 2010
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2996 Views
Lecture 7: Shewhart SPC and process capability
Dec 14, 2010
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Lecture 8: Process capability and alternative SPC methods
Dec 14, 2010
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2540 Views
Lecture 9: Advanced and multivariate SPC
Dec 14, 2010
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Lecture 10: Yield modeling
Dec 14, 2010
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Lecture 11: Introduction to analysis of variance
Dec 14, 2010
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Lecture 12 : Full factorial models
Dec 14, 2010
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Lecture 13: Modeling testing and fractional factorial models
Dec 14, 2010
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Lecture 14: Aliasing and higher order models
Dec 14, 2010
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1968 Views
Lecture 15: Response surface modeling and process optimization
Dec 14, 2010
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Lecture 16: Process robustness
Dec 14, 2010
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Lecture 17: Nested variance components
Dec 14, 2010
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Lecture 18: Sequential experimentation: "Experimentation and Robust Design and E...
Dec 14, 2010
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Lecture 19: Case study 1: tungsten CVD DOE/RSM
Dec 14, 2010
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Lecture 20: Case study 2: cycle to cycle control
Dec 14, 2010
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Lecture 21: Case study 3: spatial modeling
Dec 14, 2010
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Lecture 22: Case study 4: "Modeling the Embossing/Imprinting of Thermoplastic La...
Dec 14, 2010
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2186 Views